15:00 〜 17:00

[PS-2-02] Development of Single Crystalline 4H-SiC MEMS for Harsh Environments

^○F. Zhao¹, C. Fang Huang² (1.Washington State Univ.(USA), 2.National Tsing Hua Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-02