Reductive Kinetic Study of Oxidized Cu Surface by Catalyzed Formic Acid Vapor

P. W. Chou

doi:https://doi.org/10.7567/SSDM.2016.PS-2-5-04

2016 International Conference on Solid State Devices and Materials

2016年9月26日〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

15:00 〜 17:00

[PS-2-04] Reductive Kinetic Study of Oxidized Cu Surface by Catalyzed Formic Acid Vapor

P. W. Chou¹,^○J. M. Song¹, M. Akaike², M. Fujino², T. Suga², J. Y. Lin³ (1.National Chung Hsing Univ.(Taiwan), 2.Univ. of Tokyo(Japan), 3.Indus. Tech. Res. Inst.(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-04

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