3:00 PM - 5:00 PM

[PS-2-06] Poly-InSb nMOSFETs for Monolithic 3DIC

^○M. Takahashi^1,2, T. Irisawa², W. H. Chang², J. Tominaga², S. Fujikawa¹, H. Fujishiro¹, T. Maeda^1,2 (1.Tokyo Univ. of Science(Japan), 2.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-06