3:00 PM - 5:00 PM

[PS-2-08] Soft-rubber-packaged PZT MEMS Touch Sensor Optimized for Human-machine Interface Applications

^○T. Takeshita¹, T. Kobayashi¹, R. Takei¹, T. Itoh², S. Takamatsu² (1.AIST(Japan), 2.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-08