2016 International Conference on Solid State Devices and Materials
Sep 26, 2016 - Sep 29, 2016 Tsukuba International Congress Center, Tsukuba, Japan
11:00 AM - 11:03 AM
[PS-2-01] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System
○T. Konishi1, D. Yamane2, H. Ito2, S. Dosho2, N. Ishihara2, H. Toshiyoshi3, K. Masu2, K. Machida1 (1.NTT Advanced Tech. Corp.(Japan), 2.Tokyo Tech(Japan), 3.Univ. of Tokyo(Japan))
