The Japan Society of Applied Physics

2016 International Conference on Solid State Devices and Materials

2016 International Conference on Solid State Devices and Materials

2016年9月26日 〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

11:06 〜 11:09

[PS-2-03] Design and Characterization of the Disk-shaped Piezoresistive Pressure Sensor

○A. Y. Chang1, S. H. Tseng1, H. H. Tsai1, Y. Z. Juang1 (1.National Applied Research Labs.(Taiwan))