Rotation Analysis of the Light Scattering Variation of Latent Flaws through Light Scattering Measurement with Applied Stress Effect

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

11:18 AM - 11:21 AM

^○Y. Sakata¹, N. Terasaki¹, K. Sakai¹, K. Nonaka¹ (1.AIST(Japan))