Soft-rubber-packaged PZT MEMS Touch Sensor Optimized for Human-machine Interface Applications

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

11:21 AM - 11:24 AM

^○T. Takeshita¹, T. Kobayashi¹, R. Takei¹, T. Itoh², S. Takamatsu² (1.AIST(Japan), 2.Univ. of Tokyo(Japan))