2016 International Conference on Solid State Devices and Materials
Sep 26, 2016 - Sep 29, 2016 Tsukuba International Congress Center, Tsukuba, Japan
11:09 AM - 11:12 AM
[PS-4-04] Elliptical Pillar Duplication by Self-Aligned Double Patterning Technology
○A. J. Hong1, J. Shim1, M. Lee1, K. Lee1, K. Jung1, J. Hong1, H. Seong1, K. Kim1, S. Jeon1, Y. Kim1, J. Park1, H. Hong1, K. Lee1, E. Jung1 (1.Samsung Electronics Co. Ltd(Korea))
