The Japan Society of Applied Physics

2016 International Conference on Solid State Devices and Materials

2016 International Conference on Solid State Devices and Materials

2016年9月26日 〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

11:15 〜 11:18

[PS-4-06] SiCOH Low-k material based RRAM for BEOL Process Compatible Nonvolatile Memory Application

○L. Zheng1, Y. Dai1, L. Yu1, L. Chen1, Q. Sun1, S. Ding1, W. Zhang1 (1.Fudan Univ.(China))