SiCOH Low-k material based RRAM for BEOL Process Compatible Nonvolatile Memory Application

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

11:15 AM - 11:18 AM

^○L. Zheng¹, Y. Dai¹, L. Yu¹, L. Chen¹, Q. Sun¹, S. Ding¹, W. Zhang¹ (1.Fudan Univ.(China))