The Japan Society of Applied Physics

15:00 〜 17:00

[PS-6-06] The Study of GaN-based Fin-HEMT with Low Current Collapse Phenomenon by Plasma Enhanced Atomic Layer Deposition

A. Tzou1, S. Chen2, Z. Li3, C. Chang1, H. Kuo1,2 (1.NCTU(Taiwan), 2.National Nano Device Labs.(Taiwan), 3.Epistar(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-6-06