15:00 〜 17:00 [PS-6-11] High-Performance Thin-Film Transistors with ZnO/Al2O3 Superlattice Channel by Atomic Layer Deposition ○G. D. Cui1, D. D. Han1, J. C. Dong1, Y. Y. Cong1, X. M. Zhang1, H. J. Li1, W. Yu1, S. D. Zhang1, X. Zhang1, Y. Wang1 (1.Peking Univ.(China)) https://doi.org/10.7567/SSDM.2016.PS-6-11
