Atomic-Layer Deposited High-k Metal Gates of Ge/III Metal -Oxide-Semiconductor Devices and numerical simulations

B. Y. Chen

2016 International Conference on Solid State Devices and Materials

2016年9月26日〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

11:12 〜 11:15

[PS-6-05] Atomic-Layer Deposited High-k Metal Gates of Ge/III Metal -Oxide-Semiconductor Devices and numerical simulations

B. Y. Chen^1,2,^○C. L. Chu¹, J. L. Chen³, G. L. Luo¹, T. T. Li⁴, E. Y. Chang² (1.National Nano Device Labs.(Taiwan), 2.NCTU(Taiwan), 3.I-Shou Univ.(Taiwan), 4.National Central Univ.(Taiwan))

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