11:18 〜 11:21 [PS-6-07] Effects of Different Fe-doped GaN Buffer in AlGaN/GaN HEMTs on Si Substrate ○S. C. Chen1, J. W. Chiu1, B. H. Li1, H. C. Chiu1, R. Xuan2, C. W. Hu2 (1.Chang Gung Univ.(Taiwan), 2.Episil-Precision Inc(Taiwan))