11:24 〜 11:27 [PS-6-09] The Influence of AlGaN/GaN Schottky Barrier Diode (SBD) with SiH4 Doping in Barrier Layer ○J. W. Chiu1, S. C. Chen1, B. H. Li1, H. C. Chiu1, R. Xuan2, C. W. Hu2 (1.Chang Gung Univ.(Taiwan), 2.Episil-Precision Inc(Taiwan))