11:30 AM - 11:33 AM
[PS-6-11] High-Performance Thin-Film Transistors with ZnO/Al2O3 Superlattice Channel by Atomic Layer Deposition
○G. D. Cui1, D. D. Han1, J. C. Dong1, Y. Y. Cong1, X. M. Zhang1, H. J. Li1, W. Yu1, S. D. Zhang1, X. Zhang1, Y. Wang1
(1.Peking Univ.(China))