The Japan Society of Applied Physics

11:30 AM - 11:33 AM

[PS-6-11] High-Performance Thin-Film Transistors with ZnO/Al2O3 Superlattice Channel by Atomic Layer Deposition

G. D. Cui1, D. D. Han1, J. C. Dong1, Y. Y. Cong1, X. M. Zhang1, H. J. Li1, W. Yu1, S. D. Zhang1, X. Zhang1, Y. Wang1 (1.Peking Univ.(China))