3:00 PM - 5:00 PM
[PS-7-03] Passivation Effect of Ozone Water Treatment of InGaN/GaN Nanostructures Fabricated by Hydrogen Environment Anisotropic Thermal Etching (HEATE)
○K. Ogawa1, T. Mizutani1, S. Ishijima1, Y. Namae1, A. Matsuoka1, A. Kikuchi1,2
(1.Sophia Univ.(Japan), 2.Sophia Nanotech. Res. Center(Japan))
https://doi.org/10.7567/SSDM.2016.PS-7-03