15:00 〜 17:00

[PS-7-03] Passivation Effect of Ozone Water Treatment of InGaN/GaN Nanostructures Fabricated by Hydrogen Environment Anisotropic Thermal Etching (HEATE)

^○K. Ogawa¹, T. Mizutani¹, S. Ishijima¹, Y. Namae¹, A. Matsuoka¹, A. Kikuchi^1,2 (1.Sophia Univ.(Japan), 2.Sophia Nanotech. Res. Center(Japan))

https://doi.org/10.7567/SSDM.2016.PS-7-03