The Japan Society of Applied Physics

3:00 PM - 5:00 PM

[PS-7-03] Passivation Effect of Ozone Water Treatment of InGaN/GaN Nanostructures Fabricated by Hydrogen Environment Anisotropic Thermal Etching (HEATE)

K. Ogawa1, T. Mizutani1, S. Ishijima1, Y. Namae1, A. Matsuoka1, A. Kikuchi1,2 (1.Sophia Univ.(Japan), 2.Sophia Nanotech. Res. Center(Japan))

https://doi.org/10.7567/SSDM.2016.PS-7-03