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[PS-8-05] Influence of Post Annealing Treatment on Fixed Charge State and Chemical Bonding State of Sr-silicate Film

^○S. Taniwaki¹, M. Umano¹, H. Yoshida¹, K. Arafune¹, S. Satoh¹, Y. Hotta¹ (1.Univ. of Hyogo(Japan))

https://doi.org/10.7567/SSDM.2016.PS-8-05