15:00 〜 17:00

[PS-8-06] Formation of AlO_x/GeO_x/Ge Gate Stack Structure by Thermal Oxidation

^○A. Heya¹, N. Matsuo¹ (1.Univ. of Hyogo(Japan))

https://doi.org/10.7567/SSDM.2016.PS-8-06