Influence of Post Annealing Treatment on Fixed Charge State and Chemical Bonding State of Sr-silicate Film

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

11:12 AM - 11:15 AM

^○S. Taniwaki¹, M. Umano¹, H. Yoshida¹, K. Arafune¹, S. Satoh¹, Y. Hotta¹ (1.Univ. of Hyogo(Japan))