The Japan Society of Applied Physics

3:00 PM - 5:00 PM

[PS-9-07] Ultrafine (≤10nm) InGaN Quantum Structures Fabricated by Hydrogen Environment Anisotropic Thermal Etching (HEATE)

S. Ishijima1, T. Mizutani1, K. Ogawa1, Y. Namae1, A. Matsuoka1, A. Kikuchi1,2 (1.Sophia Univ.(Japan), 2.Sophia Nanotech. Res. Center(Japan))

https://doi.org/10.7567/SSDM.2016.PS-9-07