The Japan Society of Applied Physics

2016 International Conference on Solid State Devices and Materials

2016 International Conference on Solid State Devices and Materials

2016年9月26日 〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

15:00 〜 17:00

[PS-9-12(Late News)] Gate-stack Engineering of Self-organized Nanospherical Ge-gate/SiO2/Si1-xGex-channel on Si (100) and Si (110) for Ge MOS Devices

P. H. Liao1, C. W. Tien2, K. P. Peng2, H. C. Lin2, T. George1,○P. W. Li1,2 (1.National Central Univ.(Taiwan), 2.NCTU(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-9-12L