11:18 〜 11:21

[PS-9-07] Ultrafine (≤10nm) InGaN Quantum Structures Fabricated by Hydrogen Environment Anisotropic Thermal Etching (HEATE)

^○S. Ishijima¹, T. Mizutani¹, K. Ogawa¹, Y. Namae¹, A. Matsuoka¹, A. Kikuchi^1,2 (1.Sophia Univ.(Japan), 2.Sophia Nanotech. Res. Center(Japan))