11:55 〜 12:15

[A-6-03] In-situ Observation of Cu Residuals in Resistance Switching Failure of MoO_x/Al₂O₃ CBRAM

^○M. Arita¹, R. Ishikawa¹, S. Hirata¹, A. Turumaki-Fukuchi¹, Y. Takahashi¹ (1.Hokkaido Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.A-6-03