14:30 〜 14:45

[C-1-04] Characteristics of Heavily Phosphorus-doped Gradient Si-rich Oxide Multilayer Thin Film Structure by Spin-on Method

^○P. -R. Huang¹, S. -C. Lin¹, P. -T. Lee¹ (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2017.C-1-04