3:00 PM - 3:15 PM

[C-1-06 (Late News)] Characterization of Amorphous Silicon Passivation Layer Deposited by Facing Target Sputtering Using Temperature-Dependent Minority Carrier Lifetime Measurement

^○Y. Shiratori¹, K. Nakada¹, S. Miyajima¹ (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2017.C-1-06