CMOS Compatible 200mm Silicon Photonic Platform Suitable For High Bandwidth Applications

B. Szelag

doi:https://doi.org/10.7567/SSDM.2017.C-5-04

10:30 AM - 10:45 AM

[C-5-04] CMOS Compatible 200mm Silicon Photonic Platform Suitable For High Bandwidth Applications

^○B. Szelag¹, B. Charbonnier¹, S. Brision¹, B. Karakus¹, D. Fowler¹, O. Lemonnier¹, J. -M. Hartmann¹, P. Brianceau¹, D. Marris-Morini², E. Cassan², L. Vivien², S. Menezo¹, C. Kopp¹ (1.CEA-Leti (France), 2.C2N-Univ. Paris Sud (France))

https://doi.org/10.7567/SSDM.2017.C-5-04

2017 International Conference on Solid State Devices and Materials

[C-5-04] CMOS Compatible 200mm Silicon Photonic Platform Suitable For High Bandwidth Applications