2:20 PM - 2:40 PM [E-1-03] Plasma Induced Damage Depending on Antenna Layers in Ring Oscillators ○R. Kishida1, J. Furuta1, K. Kobayashi1 (1.Kyoto Inst. of Tech. (Japan)) https://doi.org/10.7567/SSDM.2017.E-1-03