2:40 PM - 3:00 PM

[E-1-04] Revisited Study for Fluorine Implantation Impact on NBTI for Automotive I/O Device

^○T. Yoshida¹, K. Maekawa¹, S. Tsuda¹, T. Shimizu¹, M. Ogasawara¹, H. Aono¹ (1.Renesas Electronics Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.E-1-04