Single and Double Diffusion Breaks in 14nm FinFET and Beyond

K. Miyaguchi

doi:https://doi.org/10.7567/SSDM.2017.E-2-03

4:30 PM - 4:50 PM

[E-2-03] Single and Double Diffusion Breaks in 14nm FinFET and Beyond

^○K. Miyaguchi¹, F. Bufler¹, T. Chiarella¹, P. Matagne¹, N. Horiguchi¹, A. D. Keersgieter¹, G. Eneman¹, A. Spessot¹, B. Parvais^1,2, D. Verkest¹, A. Mocuta¹ (1.IMEC (Belgium), 2.Vrije Universiteit Brussel (Belgium))

https://doi.org/10.7567/SSDM.2017.E-2-03

2017 International Conference on Solid State Devices and Materials

[E-2-03] Single and Double Diffusion Breaks in 14nm FinFET and Beyond