The Japan Society of Applied Physics

16:30 〜 16:50

[E-2-03] Single and Double Diffusion Breaks in 14nm FinFET and Beyond

K. Miyaguchi1, F. Bufler1, T. Chiarella1, P. Matagne1, N. Horiguchi1, A. D. Keersgieter1, G. Eneman1, A. Spessot1, B. Parvais1,2, D. Verkest1, A. Mocuta1 (1.IMEC (Belgium), 2.Vrije Universiteit Brussel (Belgium))

https://doi.org/10.7567/SSDM.2017.E-2-03