The Japan Society of Applied Physics

14:00 〜 14:20

[E-4-01] Design of Steep Slope Negative Capacitance FinFETs for Dense Integration: Matching of Channel and Ferroelectric Capacitances

H. Ota1, J. Hattori1, H. Asai1, T. Ikegami1, K. Fukuda1, S. Migita1, A. Toriumi2 (1.AIST (Japan), 2.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2017.E-4-01