The Japan Society of Applied Physics

11:45 〜 12:05

[E-6-02] Analysis of Inter-and Intra-Grain Defects in Electrically Characterized Poly-Si Nanowire TFTs by Multicomponent DF Imaging Based on NBD-2DI

T. Asano1, R. Takaishi1, M. Oda1, K. Sakuma1, M. Saitoh1, H. Tanaka1 (1.Toshiba Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.E-6-02