11:45 〜 12:05

[E-6-02] Analysis of Inter-and Intra-Grain Defects in Electrically Characterized Poly-Si Nanowire TFTs by Multicomponent DF Imaging Based on NBD-2DI

^○T. Asano¹, R. Takaishi¹, M. Oda¹, K. Sakuma¹, M. Saitoh¹, H. Tanaka¹ (1.Toshiba Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.E-6-02