A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors

M. Takayasu

doi:https://doi.org/10.7567/SSDM.2017.G-8-02

3:40 PM - 4:00 PM

[G-8-02] A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors

^○M. Takayasu¹, S. Dosho¹, H. Ito¹, D. Yamane¹, T. Konishi^1,2, K. Machida¹, N. Ishihara¹, K. Masu¹ (1.Tokyo Tech (Japan), 2.NTT Adv. Tech. Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.G-8-02

2017 International Conference on Solid State Devices and Materials

[G-8-02] A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors