14:00 〜 14:15

[H-1-02] Moisture Barrier Properties of Single-Layer Graphene Deposited on Cu Films for Cu Metallization

^○P. Gomasang¹, T. Abe¹, K. Kawahara², Y. Wasai³, N. Nabatova-Gabain³, N. T. Cuong⁴, H. Ago², S. Okada⁵, K. Ueno^1,6 (1.Shibaura Inst. of Tech. (Japan), 2.Kyushu Univ. (Japan), 3.Horiba Ltd. (Japan), 4.NIMS (Japan), 5.Univ. of Tsukuba (Japan), 6.SIT Res. Center for Green Innov. (Japan))

https://doi.org/10.7567/SSDM.2017.H-1-02