16:10 〜 16:30 [H-2-02] Silicon Photonic Biosensors with MEMS Flow Control ○Y. Amemiya1, A. K. Sana1, Y. Nakashima1, J. Maeda1, S. Yokoyama1 (1.Hiroshima Univ. (Japan)) https://doi.org/10.7567/SSDM.2017.H-2-02