Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology

I. Tsuji

doi:https://doi.org/10.7567/SSDM.2017.H-2-03

16:30 〜 16:50

[H-2-03] Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology

^○I. Tsuji¹, M. Takayasu¹, H. Ito¹, D. Yamane¹, S. Dosho¹, T. Konishi^1,2, N. Ishihara¹, K. Machida¹, K. Masu¹ (1.Tokyo Tech (Japan), 2.NTT Adv. Tech. Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.H-2-03

2017 International Conference on Solid State Devices and Materials

[H-2-03] Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology