The Japan Society of Applied Physics

16:30 〜 16:50

[H-2-03] Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology

I. Tsuji1, M. Takayasu1, H. Ito1, D. Yamane1, S. Dosho1, T. Konishi1,2, N. Ishihara1, K. Machida1, K. Masu1 (1.Tokyo Tech (Japan), 2.NTT Adv. Tech. Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.H-2-03