The Japan Society of Applied Physics

3:00 PM - 3:15 PM

[J-1-06] Investigation of the effective net charge of strontium silicate layers on silicon substrates at changing annealing condition

S. Taniwaki1, H. Yoshida1, K. Arafune1, A. Ogura2, S. Satoh1, Y. Hotta1 (1.Univ. of Hyogo (Japan), 2.Meiji Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.J-1-06