Efficient Coupling of Lateral Force in GaN Nanorod Piezoelectric Nanogenerators by Vertically Integrated Pyramided Si Substrate

C. -L. Wu

doi:https://doi.org/10.7567/SSDM.2017.J-5-02

10:00 AM - 10:15 AM

[J-5-02] Efficient Coupling of Lateral Force in GaN Nanorod Piezoelectric Nanogenerators by Vertically Integrated Pyramided Si Substrate

^○C. -L. Wu¹, S. -J. Tsai¹, C. -Y. Lin¹, C. -L. Wang¹, J. -W. Chen¹, C. -H. Chen² (1.National Cheng Kung Univ. (Taiwan), 2.National Synchrotron Radiation Research Center (Taiwan))

https://doi.org/10.7567/SSDM.2017.J-5-02

2017 International Conference on Solid State Devices and Materials

[J-5-02] Efficient Coupling of Lateral Force in GaN Nanorod Piezoelectric Nanogenerators by Vertically Integrated Pyramided Si Substrate