New Characterization Technique for Detection of Atomic-sized Crystalline Defects and Strain Using Moiré Method

M. Kodera

doi:https://doi.org/10.7567/SSDM.2017.J-7-01

1:40 PM - 1:55 PM

[J-7-01 (Late News)] New Characterization Technique for Detection of Atomic-sized Crystalline Defects and Strain Using Moiré Method

^○M. Kodera¹, Q. Wang², S. Ri², H. Tsuda², A. Yoshioka¹, T. Sugiyama¹, T. Hamamoto¹, N. Miyashita¹ (1.Toshiba Electronic Devices & Storage Corp. (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.J-7-01

2017 International Conference on Solid State Devices and Materials

[J-7-01 (Late News)] New Characterization Technique for Detection of Atomic-sized Crystalline Defects and Strain Using Moiré Method