2:25 PM - 2:40 PM
[J-7-04 (Late News)] A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes
○S. Otobe1, D. Yamane1, T. Konishi1,2, T. Safu2, H. Ito1, S. Dosho1, N. Ishihara1, K. Machida1, K. Masu1
(1.Tokyo Tech (Japan), 2.NTT Advanced Tech. Corp. (Japan))
https://doi.org/10.7567/SSDM.2017.J-7-04