The Japan Society of Applied Physics

2:25 PM - 2:40 PM

[J-7-04 (Late News)] A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes

S. Otobe1, D. Yamane1, T. Konishi1,2, T. Safu2, H. Ito1, S. Dosho1, N. Ishihara1, K. Machida1, K. Masu1 (1.Tokyo Tech (Japan), 2.NTT Advanced Tech. Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.J-7-04