A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes

S. Otobe

doi:https://doi.org/10.7567/SSDM.2017.J-7-04

14:25 〜 14:40

[J-7-04 (Late News)] A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes

^○S. Otobe¹, D. Yamane¹, T. Konishi^1,2, T. Safu², H. Ito¹, S. Dosho¹, N. Ishihara¹, K. Machida¹, K. Masu¹ (1.Tokyo Tech (Japan), 2.NTT Advanced Tech. Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.J-7-04

2017 International Conference on Solid State Devices and Materials

[J-7-04 (Late News)] A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes