09:30 〜 09:50

[K-3-01] A new kinetic model for thermal oxidation of Ge

^○X. Wang¹, T. Nishimura¹, T. Yajima¹, A. Toriumi¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2017.K-3-01