The Japan Society of Applied Physics

9:30 AM - 10:00 AM

[K-5-01 (Invited)] CMOS Compatible Ferroelectric Devices for Beyond 1X nm Technology Nodes

S. Müller1,H. Mulaosmanovic2, S. Slesazeck2, J. Müller3, T. Mikolajick2,4 (1.Ferroelectric Memory GmbH (Germany), 2.NaMLab gGmbH (Germany), 3.Fraunhofer IPMS (Germany), 4.IHM TU Dresden (Germany))

https://doi.org/10.7567/SSDM.2017.K-5-01